Zeiss CrossBeam 1540XB
DEVICE
Location
Universities in Europe /
University of Konstanz /
Department of Physics /
Nanostructure Laboratory
Konstanz, Germany
Konstanz, Germany
Contact Person
Selected Keywords
microscopy
Message to Contact PersonProfile
Name |
Zeiss CrossBeam 1540XB |
Category |
Device |
Contact Person |
Scilife Support |
Address |
Universität Konstanz Germany |
Keywords
microscopyDescription
Ultra high resolution FESEM (1.1 nm @ 20 kV)
High performance FIB column (7 nm @ 30 kV)
High resolution live imaging during milling and polishing
Imaging and analysis possibilities: SE2, InLens, BSD, STEM, EDX
Multichannel Gas Injection System
Fast beam blanker and two external pattern generators for lithography with e-beam and Ga+-ion beam
Statistics
Created |
09 April 2008 |
Last Update |
over 4 years ago |
People |
0 |
Related Publications |
0 |
Reponsible For This Entry |
Scilife Support |
Related Groups
Main Group:
Nanostructure Laboratory
FacilityLeader: Scilife Support
Konstanz, Germany
nanoelectronics, nanomagnetism, nanooptics, nanoparticles
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